• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    An arrangement for measuring and controlling the thickness of optically transparent coatings during their build-up on substrates in vacuum coating installations. The measurement is carried out by determining at least one reference value and at least one measured value for the transmission or reflection value of the coated object by using a measuring light beam, a monochromator, a photo-receiver, an amplifier and an analyzing circuit.
    公开号:SU1584759A3
    申请号:SU823482210
    申请日:1982-08-23
    公开日:1990-08-07
    发明作者:Швикер Хорст；Цемер Альфонс
    申请人:Лейбольд Аг (Фирма)；
    IPC主号:
    专利说明:

    The invention relates to instrumentation technology and can be used to measure and control the thickness of optically active layers.
    The aim of the invention is to provide measurement and indication of the absolute values of characteristics in transmitted and / or reflected light of covered objects at arbitrary layer thicknesses, both for individual wavelengths of measuring light and, optionally, for a specific spectrum, to display the spectral properties object in the form of a curve with absolute values.
    - Fig. 1 shows parts of a photometric device. And in a vacuum deposition apparatus; figure 2 - diagram of the photometric device; FIG. 3 shows graphical dependencies between the first and second comparative values, as well as the gain for the control glass not covered with a layer, as a function of the wavelength of the light; Fig. 4 shows the graphical ratio of the measured value from the object covered with the layer to the absolute values of the transmission (or reflection) as a function of length.
    The optical part of the photometric device consists of
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    cl
    cm
    in the outer part of the vacuum deposition unit 1 comprising a chamber 2 with two windows 3 and 4 and a glass 5 measured, a light source b, the measuring beam 7 of which determines the course of the rays 8, a translucent mirror
    9, a collecting lens 10, an adjustable monochromator 11, and a photodetector 12, indicator unit 13. The photometric device also includes an adjustable monochromator 14, optically coupled to the photodetector 15, it is possible to connect to the last indicator unit 16. The device also contains two zero apertures 17 (a, c) a switch 18, which is connected by wire 19 to an adjustable amplifier 20, which is connected by wire 2 to a setting device 22, the output of which is connected by wire 23
    with a storage unit 24 for storing a gain factor G., the output of the amplifier 20 by a wire 25 is connected to a switch 26, the outputs of which by wires 27 to 29 are connected to the storage units 30 to 32 I values,
    10, I, respectively, the outputs of the blocks 30 to 32 are connected to the evaluation circuit 33, which is connected to the monochromators 11 by the control wire 34
    and 14, feedback 35 goes to gauge 22 for gain.
    Photometric device works as follows.
    Of great importance is the linearity of the characteristic for the gain G, which must be linear within a range of at least two decimal orders of magnitude with a maximum deviation of 2%, preferably a maximum of 1%. Such an amplifier can, for example, be realized by using a silicon photocell operating in the short-circuit mode and a quartz-stabilized amplifier with phase automatic tuning. Using such an amplifying device, the linearity of the photometer can be achieved in the range of four decimal orders of magnitude with an error of less than 1% (absolute).
    The selection of the gain factor is in actual connection with the formation of the first comparative value I, and the second comparative value I, which should be significantly, namely as much as possible, different from one another. So called
    0
    five
    0
    five
    0
    five
    0
    five
    the comparative values are intensity values of the portion of the measuring light beam incident on the photodetector, and this portion can vary between 0 and 100%.
    The indicated comparative values are important for calibrating the measurement process or device. The device is calibrated by a two-point calibration method. In the case of transmission measurement, to obtain the first calibration point for I, or not
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    the control glass is positioned along the beam, i.e. The measuring light beam goes un-attenuated and its energy in the photodetector is 100%, or a control glass is introduced into the beam path without a coating layer. Due to the known refractive index applied to the control glass of the floor, a certain transmittance, for example, I 92%, is applied for the refractive index n 1.5. When measuring reflection, a control glass is used without a coating layer, but with a matte back side so that there light is reflected diffusely.
    As a result, only the reflection from the front surface needs to be taken into account. From the known refractive index of the control glass, it is possible to calculate the magnitude of the reflection, e.g. 4.2%, with the refractive index n 1.5.
    The second comparative value I also relates to the intensity arriving at the photodetector, which, however, is much lower and in the most favorable case is zero. To obtain the second comparative IQ value when measuring the transmittance (the input of the amplifier is grounded or a so-called null diaphragm is introduced into the beam path. When measuring reflections, by contrast, only the introduction of a zero diaphragm into the beam of the measuring light can be used. An opaque body is defined as zero diaphragm which does not transmit and / or does not reflect any light. In the simplest case, it is a movable black plate with a matte surface. To suppress any reflection residues, the black sheet NCA has a wedge shape to at least one surface thereof held at an angle to move the beam, so that the comparative values IL and I0 have
    a considerable distance between each other. This distance can be increased, and in the sense of maximum indication accuracy, estimate if the gain factor G of the amplifier related to an uncoated test glass will be increased to such an extent that the first comparative value 1 essentially reaches its maximum, the first comparative value I should be as large as possible, however provided that the amplifier does not fall into the saturation range.
    The invention is based on the fact that two points define a straight line. Due to the distance between the first and second comparative values, the required linearity can be achieved using only one amplifier that has the indicated properties.
    By storing the GL, I, and I values, after specifying the corresponding wavelength, and if necessary also depending on the wavelength, as an image of a curve, you can interrogate the corresponding values at any time with a counting device, and by means of microprocessor counting operations, mathematically combine them with the measured value I covered with a layer, or being in the process of coating with a layer of an object. After calibration, depending on the wavelength, the values of IL (always the maximum possible) are remembered, and 10, as well as the values of the gain G for the uncoated test glass. The gain of GL is not constant over the entire range. Moreover, it turns out that just in the middle of the spectral range of the visible light of the measuring light source, the gain factor has a minimum, because the spectral intensity of the measuring light source in this place has a maximum. E-If now the first comparative value of I is set to the maximum possible value, which is obtained automatically by the operation of the counting device of the evaluation scheme, then it is mostly constant values for
    IL, but not for GL.
    For the absolute value of the transmittance, T is determined by the formula
    I - 10
    (as a dimensionless quantity from 0 to 1) 5 or, respectively, for absolute reflection of R
    R
    I - i.
    Rb
    IL-Io
    0
    five
    0
    five
    0
    five
    0
    five
    0
    (as a dimensionless value from 0 to 1) where I is the measured value from the covered object; R, is the calculated reflection of the uncoated control glass, calculated from the known refractive index; T is the light transmission of the uncoated layer of the control glass, calculated from the known refractive index, or in the absence of the control glass 1, 0.
    Finally, to the described automatically conducted counting devices, the counting operations, the stored value or, respectively, the stored values for amplifying G are polled by the counting unit. A variable gain factor G is constructed based on the following relationships: for transmittance: G GL T L and for reflection: G GL-R ,.
    In the counting unit, the measured quantity I is amplified or multiplied by the corresponding gain factor G and is represented as a function of wavelength. This applies to absolute transmission values T and absolute reflection values R, which are electronically displayed by means of a cathode-ray display as a graph or printed using a printing device, or digitally displayed on a digital indicator system. The corresponding values and curves give complete information about the optical properties of the corresponding object and do not require any comparative measurements with samples, etc.
    It is not necessary to reinforce the measured value I from the object covered with a layer to be stored in a memory device. After calibration of the device, without any further difficulty, the measured value of I can be immediately converted using the above operations and displayed. However, it is advisable to also measure the measured value in a memory device, so that it can be
    7558
    polled for various counting operations after some time.
    Outside the vacuum chamber 2 there is a source 6 of light, from which the concentrated light beam 7 of the measuring light goes in the direction of the windows 3 and 4. The measuring beam 7 determines the course of the beam
    whose 8, in which the translucent mirror 9 is first placed at an angle of 45. In the course of the rays 8, there is a collecting lens 10. It is essential that for the reflection measurement the window 3 is set at such an inclination that no reflections from the window 3 can get into beam 8.
    Behind window 3, a measuring beam of light 7 hits the control glass 5, and (at first) the smallest part of the measuring light, like the reflected beam of measuring light 7a, is thrown back to the translucent mirror 9. In this case, the reflection measurement is said. For this purpose, the control glass 5 has a flat front surface (a), but a rough or diffuse rear surface (b), so that light reflected from the front surface (a) is returned to the mirror 9.
    Mirror 9 reflects the returned measuring beam 7a at an angle of 90 and then it hits an adjustable monochromator 11. Through the monochromator 11, only that part of the measuring beam 7a is passed through the monochromator 11. Here the silicon photodetector is meant. , the output of which through the evaluation circuit (not shown) is connected to the indicator device 13.
    In the device, it is important that the measuring beam 7 absolutely perpendicularly falls on the control glass 5. Since any deviation from the perpendicularity leads to uncontrollable phenomena in the sense of reflection along the beam from the source 6 of the light, one monochromator 14, which uses the same function as the monochromator 11. As a monochromator, either an interference linear filter, an interference ray tracing filter, or grating monochromators are used. Skip wavelength in8
    The thermal beam path filter, as well as the grating monochromator, can be changed using a stepper motor (not shown).
    The measuring light beam left behind the control glass 5 is indicated by the dotted line (b). This is used for the so-called transmission measurement, i.e. the part of the measuring light that is transmitted through the monochromator in the form of light of a certain wavelength to the photodetector 15, which has the same design as the photoreceiver 12. The output of this photodetector is connected to the indicator device 16 through the same evaluation circuit.
    The control glass 5 has two even or smooth surfaces for measuring the transmission. When calibrating the transmittance, the control glass can also not be set, so that the light receptor 15 will receive a few percent of the world.
    Figure 1 shows two more zero diaphragms 17a and 17b, of which some are used for measurement. In order to avoid erroneous measurements, these zero orifice plates when using an obliquely mounted window 3 should be either in the place of the zero aperture 17a, i.e. between lens 10 and window 3, or in place of the zero diaphragm 17b directly in front of the control glass 5, i.e. between window 3 and the control glass 5. The zero diaphragms are needed at the indicated places because the reflection occurs not only from the control glass or the object of measurement, but also from the lens, which cannot be put obliquely.
    When measuring the second comparative value 10, one of the two zero diaphragms 17a or 17b is introduced into the beam 8 in the direction of the arrows, so that part of the measuring beam is quenched. The zero diaphragms consist preferably of a matte black plate, preferably wedge-shaped, which causes maximum light absorption.
    The outputs of both photodetectors 12 and 15 are connected to a switch 18. At the switch position shown, a reflection measurement is taken,
    When switching to a different position, a transmission measurement can be made by means of a photodetector 15. From switch 18, wire 19 goes to an adjustable amplifier 20, which has the above properties. In order to set a specific gain GL in front of amplifier 20, drive 21 is connected to sensor 22, the output of which by wire 23 is fed to storage device 24 for storing gain GL, which is determined by the uncoated control glass (or in the absence of glass) as described above. maximum of the first comparative value
    V
    From the output of amplifier 20, wire 25 goes to switch 26, whose outputs from wires 27 to 29 are connected to storage devices 30 to 32. The storage device 30 serves to store the first comparative value I, which is at the maximum possible gain, and the amplifier still does not fall in the saturation range. The memory device 31 serves to store a second comparative value 10, which is obtained using a zero aperture (or similarly, grounding the input of the amplifier) and amplified with the same gain factor G as the first comparative value I. The memory 32 serves to store the actual measured quantity I from the object covered with the layer.
    All storage devices 24, 30, 31 and 32 are connected by respective wires to the evaluation circuit 33, in which there is a counting device with which the counting operations are carried out.
    From the evaluation circuit 33, control wire 34 goes to both monochromators 11 and 14 in order to either set them at a certain wavelength or control them to pass a certain wavelength spectrum. Feedback 35 goes to setpoint adjuster 22 for gain. Through the evaluation circuit 33, it is thus achieved that the gain is chosen just so large that the first comparative value 1 reaches an acceptable level,
    before amplifier 20 comes to saturation.
    The evaluation circuit 33 is connected to the indicator device 13, which is shown in the form of an electron-beam indicator screen, but a coordinate plotter, a printing device or a digital indicator device can be used if, for example, you need to display a single measurement at a certain wavelength.
    In FIG. 3, the wavelength is plotted on the abscissa, while the ordinates are the first and second comparative values, as well as the gain GL, as they usually are obtained. Units of measurement are not indicated, since only the principle of measurement is important. It should be borne in mind that curve 36 for the first comparative magnitude after lifting it due to the corresponding gain goes almost horizontally. Curve 37 for the second comparative value 10 has about the same appearance. On the contrary, curve 38 for the gain factor C, which represents the required gain, which must be set in order to obtain the largest possible values for I, behaves quite differently. This curve has a pronounced minimum. i
    In Fig. 4, the wavelength is also plotted along the abscissa axis, while the ordinate shows the progress of the measured (enhanced) quantity I measured for the coated test glass at the output of the photometer, as well as the absolute transmission and reflection values. Curve 39 symbolizes the course of the measured value I over the spectrum, which, although it characterizes the course of reflection or transmission over the spectrum, however, in relative units, which allow only in principle to evaluate the results of coating the product with a layer during the coating process. On the basis of the computational operations, curve 40 is obtained, which shows the spectral dependence of the transmission values T or the reflections P in absolute values. Curve 40, although similar to curve 39, is, however, constructed with allowance for variable gain (curve 38 in FIG. 3), i.e. curve 39 is distorted with respect to the absolute curve 34.
    111584759
    formula of invention
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    and
    权利要求:
    Claims (3)
    [1]
    1. A photometric device for measuring and controlling the thickness of optically active layers comprising an optically coupled light source, a monochromator and a photodetector, an amplifier, and an evaluation circuit with an output intended for an indicator unit and / or control loop, such as In order to provide measurement and indication of the absolute values of characteristics in transmitted and / or reflected light of covered objects with arbitrary thicknesses of layers, the amplifier has a gain characteristic at least in within two decimal orders of magnitude, linear with a maximum deviation of 2%, preferably a maximum of 1%, the device is equipped with interchangeable elements, which are uncoated control glass, transparent or with a diffuse back side, to form the first I compare
    Yu
    15
    body size, and zero aperture to form a second 10 comparative value, storing the first IL block, the second 10 comparative values and the G, signal, proportion
    gain gain, gain gain encoder, storage blocks of comparative values I and IQ are included after the amplifier, and the storage block of the GQ signal is turned on after the setpoint device, all storage units are connected to the counting unit of the evaluation circuit, which is connected via feedback to the setting unit gain factor.
    [2]
    2. A device according to claim 1, characterized in that it is provided with a storage unit for measuring quantity I, connected between the amplifier and the counting unit of the evaluation circuit.
    [3]
    3. A device according to claim 1, characterized in that the counting unit of the evaluation circuit of the control output is connected to the monochromator.
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    36
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    引用文献:
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    GB1594710A|1977-12-21|1981-08-05|Lippke Gmbh Co Kg Paul|Manufacture of films of plastics material|
    JPS5535214A|1978-09-04|1980-03-12|Asahi Chem Ind Co Ltd|Method and device for film-thickness measurement making use of infrared-ray interference|
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    US4837044A|1987-01-23|1989-06-06|Itt Research Institute|Rugate optical filter systems|
    EP0290657A1|1987-05-15|1988-11-17|KSB Aktiengesellschaft|Method and device for measuring the optical properties of thin layers|
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    US5101111A|1989-07-13|1992-03-31|Dainippon Screen Mfg. Co., Ltd.|Method of measuring thickness of film with a reference sample having a known reflectance|
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    US9013450B1|2003-11-03|2015-04-21|Imaging Systems Technology, Inc.|IR touch|
    DE102005008889B4|2005-02-26|2016-07-07|Leybold Optics Gmbh|Optical monitoring system for coating processes|
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    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE3135443A|DE3135443C2|1981-09-08|1981-09-08|
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